Product Profile
Attitude Insensitive Flow Sensor
Eliminates air convection currents inside its case without sacrificing
response speed.
Can be mounted in any position without requiring zero adjustment.
Superior Bypass Design to Operate
under Laminar Flow Conditions
Assures accuracy over the entire range of mass flow controller.
Easily removed for range changes.
Solid State Valve Assembly
Constructed of Type 316 Stainless
Steel
Completely compatible with reactive and corrosive materials.
Design eliminates internal dead volumes.
Laminar Flow
Eliminates the need for complex, interactive multi-point linearization
during calibration
Product Features
Product Benefits
Process Values
Designed to meet the exacting requirements of
semiconductor processes and equipment, the
Tylan FC260 and Tylan FM360 models are
premium quality elastomer-sealed mass flow
controllers and meter. These MFCs combine
proven components and techniques with
innovative concepts in both mechanical and
electrical design.
Excellent Performance
Tylan FC260 qnd FM360 mass flow controllers and
flowmeters accurately and reliably measure and
control flow rates of gases up to 200 standard liters
per minute without the need for pressure or
temperature corrections.
Low cost mass flow controllers with long-term repeatability and performance
Tylan FC260/FM360
Mass Flow Controllers and Flowmeters
3
Tylan FC260/FM360 MFCs and Flowmeters - Ordering Information
Performance
Gases
Any gas with a known conversion factor
Step Response Time
6 seconds (dependent on step request and conditions)
Accuracy
1% of full scale
2% of full scale for the FC262
Linearity
0.5% of full scale
Repeatability
0.2% of full scale
Attitude Sensitivity
Not sensitive
Control Range
50:1 (100% - 2%)
FC262 50:2 (100% - 4%)
Mechanical
Materials
Type 316 Stainless Steel, Viton
, Kalrez
, or
Neoprene Seals depending on gas application
Leak Integrity
1 x 10
-9
atm cc/sec He
Electrical
Analog Output
0 - 5 VDC (5 volts = full scale)
Input Power
Flow Controllers:
+ 15 VDC 4%, 25 mA max
- 15 VDC 4%, 180 mA max
Flow Meters:
+ 15 VDC 4%, 25 mA max
- 15 VDC 4%, 25 mA max
Power Consumption
Flow Controllers:
4.0 watts maximum
Flow Meters:
1.5 watts maximum
Command Signal
Flow Controllers:
0 - 5 VDC (2.5 k ohms max source impedance)
40-20 mA optional (contact Mykrolis)
Minimum Load
Resistance
2000 ohms
Environmental
Temperature Range
5 - 43 C (40 - 110 F)
Temperature
Coefficient
0.1%/ C
Pressure Coefficient
0.007%/psi
Note: In accordance with SEMI Standard E12-91, Standard Temperature is 0 C
and Standard Pressure is 760 mm Hg (14.7 psia).
Model
Ordering Information
Flow Controllers
FC260
FC261
FC262
Flow Meters
FM360
FM361
FM362
Fitting
2S = 1/8" Swagelok
4S = 1/4" Swagelok
4VC0 = 1/4" VCO
4V = 1/4" VCR
6S = 3/8" Swagelok
6VC0 = 3/8" VCO
6V = 3/8" VCR
Full Scale Flow*
Gas
Flow Controllers
Flow Meters
Model
FC260
FC261
FC262
FC360
FC361
FC362
Full Scale
Range
10 sccm - 5 slm 6 - 20 slm
30 - 200 slm 10 sccm - 5 slm 6 - 20 slm
30 - 200 slm
Pressure
Drop
10 - 40 psid
15 - 40 psid 20 - 40 psid
0.5 psid at full scale flow
Gas Pressure
30 psig optimum
150 psid max
40 psig
optimum
150 psid
max
500 psid max
Gas Fittings
1/8" or 1/4"
1/4"
1/4" or 3/8" 1/8" or 1/4"
1/4"
1/4" or 3/8"
Weight
500 gm
(1.1 lb)
954 gm
(2.1 lb)
2.77 kg
(5.0 lb)
454 gm
(1.0 lb)
907 gm
(2.0 lb)
2.15 kg
(4.75 lb)
*See specifications table for
model-specific limits.
Consult our applications specialists with any questions.
Tylan is a registered trademark of Mykrolis Corporation.
Mykrolis and the Mykrolis logo are trademarks of Mykrolis Corporation.
Kalrez and Viton are trademarks of DuPont Dow Elastomers, L.L.C.
Swagelok is a trademark of Crawford Fitting Company.
VCO and VCR are trademarks of Cajon Company.
UNITED STATES OF AMERICA
(+1) 978-436-6500 Billerica, MA
(+1) 972-359-4000 Allen, TX
Lit. No. PF1062ENUS Rev. A 18 April 2003
Printed in the U.S.A. 1998-2003 Mykrolis Corporation. All rights reserved.
Legal/Trademarks: www.mykrolis.com/corporate.nsf/docs/legal
Worldwide Offices: www.mykrolis.com/corporate.nsf/docs/worldwide
JAPAN
(+81) 3-5442-9718 Tokyo
(+81) 92-471-8133 Kyushu
(+81) 6-6390-0594 Osaka
EUROPE
(+33) 4-76-35-73-50
ASIA
(+65) 6 745-2422
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