ChipFind - документация

Электронный компонент: L1314

Скачать:  PDF   ZIP
WATER-COOLED TYPE
DEUTERIUM LAMPS
L1314, L1835
lnformation furnished by HA MAM ATS U is believed to be reliabIe. However, no responsibility is assumed for possibIe inaccuracies or omissions. Specifications are
subject to change without notice. No patent rights are granted to any of the circuits described herein.
1998 Hamamatsu Photonics K.K.
Subject to local technical requirements and regulations, availability of products included in this promotional material may var y. Please consult with our sales office.
APPLICATIONS
GENERAL
Parameter
Parameter
Value
L1835
L1314
Unit
Unit
Spectral Distribution
Window Material
Aperture Size
Cooling Method
Weight (Approx.)
nm
--
mm dia.
--
g
160 to 400
Synthetic silica
720
2.5
Water cooling
Warm-up
Operation
Discharge Starting Voltage
Anode Current
Tube Drop Voltage
Output
Stability
Water Flow Rate
Estimated Life
Heater Voltage
Heater Current
Warm-up Time
Heater Voltage
Heater Current
Drift
Fluctuation
Vdc, ac
Adc, ac
s
Vdc
Adc
Vdc Min.
A
Vdc
%/h Max.
%p-p Max.
L/min
h
10
1
1.2
20
5
1
500
1.2
120
10
1.0
0.5
1.5
300
115 to 400
MgF
2
950
Figure 1: Spectral Distribution (UV range)
TLSOF0140
Left: L1835 Right: L1314
TLSOC0016EB
TLSOB0054EA
TLSOB0055EA
Spectrophotometer, Fluorescence Spectrophotometer
Removal of static electricity from the semiconductor wafer
PID (Photo Ionization Detector)
Solar Simulator
Optical CVD
Optical Chemical Reaction
Excitation Light Source
High Intensity, 150W Type,
Vacuum UV (from 115nm) Light Source-L1835
The L1314 and L1835 are water-cooled 150W deuterium lamps that
deliver a radiant intensity 3 to 4 times higher than standard 30W
deuterium lamps. The lamp bulb is enclosed in a cylindrical metal jacket
specially designed for water cooling. The L1314 has a synthetic silica
window for an efficient emission of UV radiation, and the L1835 employs
a MgF2 (magnesium fluoride) window which even allows emitting
vacuum UV radiation. Select the lamp that matches wavelengths
required by your application. Vacuum flanges are also available as
options in the L1835 for easy mounting to a vacuum chamber.
Types L1314 and L1835 cannot be
operated without cooling water
passing through them. Care
should be taken that the lamp is
positioned properly so that the two
nozzles are aligned vertically, with
the water flowing into the jacket at
the bottom nozzle and leaving the
jacket at the top nozzle. If this
arrangement is not observed,
there is a danger of damaging the
lamp due to overheating.
RECOMMENDED OPERATING CONDITION
/ CHARACTERISTICS(at 25
C)
INLET
OUTLET
U P
100
80
60
40
20
0
110
120
130
140
150
160
170
180
RELATIVE OUTPUT INTENSITY (%)
WAVELENGTH (nm)
121.6
125.4
160.8
Flow of cooling water
L1835: Vacuum UV range
1.2
1.0
0.5
0.1
0.05
0.01
160
200
240
280
320
360
400
RADIANT INTENSITY (
W/cm
2
. nm at 30cm)
WAVELENGTH (nm)
L1314, L1835
30W TYPE
L7292 / L7293
NOTE
WATER-COOLED TYPE DEUTERIUM LAMPS L1314, 1835
Figure 2: Dimensional Outline
TLSO1012E02
AUG. 1998 SI
Printed in Japan (300)
Dimensional Outline E3444-02 (Unit: mm)
Attachment Reference
TLSOA0027EC
TLSOA0028EB
TLSOA0053EA
TLSOC0017EB
Since the L1835 vacuum UV deuterium lamp is often used while instal-
led onto a vacuum chamber, Hamamatsu provides the E3444 series
vacuum flanges specially designed for this purpose. Among these, the
E3444-02 has a flange conforming to ICF114 specifications, allowing
easy installation onto most vacuum chamber ports. The E3444 series
also includes a general-purpose "N" flange and JIS (Japanese Industri-
al Standards) specification flange. Select the desired type depending
on the vacuum equipment to be used.
The C3150 power supply is specifically designed for water-cooled
150W lamps. Various devices to provide stable light output are built
into this power supply. Protective functions such as a water flow rate
monitor and lamp lighting monitor also ensure safe and correct opera-
tion.
Since the L1835 is often used inside a
vacuum chamber, a special vacuum
flange is provided. It is designed to be
simply inserted over the lamp housing.
POWER SUPPLY C3150
CHARACTERISTICS
VACUUM FLANGE E3444 SERIES (for L1835)
SPECIFICATIONS
CATHODE
IC
ANODE
HEATER
1
4
2
3
PIN CONNECTION
( Connector : Miyama
Elec . MC-032 )
L1314
L1835
OPTION
Type No.
Flange
Sealing
Method
Mount
Flange
Sealing Force
Retention
E3444
E3444-01
E3444-02
O-Ring
Regular
JIS VF50
ICF114
--
JIS VF50
ICF114
1.33
10
-4
Pa L/s or less
(1
10
-6
Torr L/s)
Parameter
Description/Value
Output Current
Output
Voltage
Trigger Voltage
Output
Fluctuation
Over-load Protection
Normal Operation
No Load
Input Fluctuation (
10%)
Load Fluctuation (nomal operation range)
Drift
Ripple
1.2Adc
120
25Vdc
250Vdc
600Vp
0.1% Max.
0.1% Max.
0.1%/h Max.
0.1%p-p Max.
1.5A Fuse
Parameter
Description/Value
Output Voltage for Warm-up
Warm-up Time
Output Voltage for Operation
Input Fluctuation (
10%)
Over-load Protection
Input Source Voltage
Apparent Power
Operating Ambient temperature
Performance Guaranteed Temperature
Cooling Method
Cooling Water Detection Method
Protective Functions
(LED on when malfunction)
External Dimensions (mm)
Weight
10Vdc 1.2A
Approx. 30 s
5
0.5Vdc 1.0A
1.0% or less
2A slow-blow or by electronic circuit
AC100/118/230V
10%
Approx. 330VA
0 to 40
C
+5 to +35
C
Forced air cooling
Flow rate switch (1.5 L/min)
Less cooling water,
excessive temperature in the C3150,
short circuit, disconnection
215(W)
125(H)
265(D)
Approx. 10kg
40
8- 8.4
70
0.3
114
P.C.D. 92.2
O-RING
Filament (heater) output
Anode output
VACUUM FLANGE
50.8
8
95
25
11
42
50
48
25.4
192
110
ARC
POINT
CATHODE
IC
ANODE
HEATER
1
4
2
3
PIN CONNECTION
( Connector : Miyama
Elec . MC-032 )
HAMAMATSU PHOTONICS K.K., Electoron Tube Center
314-5, Shimokanzo, Toyooka-village, Iwata-gun, Shizuoka-ken, 438-0193, Japan, Telephone: (81)539/62-5248, Fax: (81)539/62-2205
U.S.A.: Hamamatsu Corporation: 360 Foothill Road, P. O. Box 6910, Bridgewater. N.J. 08807-0910, U.S.A., Telephone: (1)908-231-0960, Fax: (1)908-231-1218
Germany: Hamamatsu Photonics Deutschland GmbH: Arzbergerstr. 10, D-82211 Herrsching am Ammersee, Germany, Telephone: (49)8152-375-0, Fax: (49)8152-2658
France: Hamamatsu Photonics France S.A.R.L.: 8, Rue du Saule Trapu, Parc du Moulin de Massy, 91882 Massy Cedex, France, Telephone: (33)1 69 53 71 00, Fax: (33)1 69 53 71 10
United Kingdom: Hamamatsu Photonics UK Limted: Lough Point, 2 Gladbeck Way, Windmill Hill, Enfield, Middlesex EN2 7JA, United Kingdom, Telephone: (44)181-367-3560, Fax: (44)181-367-6384
North Europe: Hamamatsu Photonics Norden AB: Frgatan 7, S-164-40 Kista Sweden, Telephone: (46)8-703-29-50, Fax: (46)8-750-58-95
Italy: Hamamatsu Photonics Italia: S.R.L.: Strada della Moia, 1/E, 20020 Arese, (Milano), Italy, Telephone: (39)02-935 81 733, Fax: (39)02-935 81 741
50.8
8
85
25
11
150
80
40
25.4
ARC
POINT