NEW
SHORT ARC
MERCURY XENON LAMP SERIES
100 W L8029, 250 W L8706, 500 W L8288
OVER VIEW
The L8029, L8706 and L8288 are mercury-xenon lamps
using a newly developed cathode that provide a short
gap and long service life.
The L8029 in particular deliver high radiant output in the
UV region near 250 nm, about twice that of
conventional lamps.
The L8029, L8706 and L8288 are expected to be a
promising light source that enhances performance of
semiconductor inspection systems.
APPLICATIONS
GShort Arc
GLong Life
GHigh UV Intensity (100 W)
FEATURES
GThin Film Measurement
GWafer Inspection
GMicroscope
GUV Curing
GUV Illuminator
GEndoscope
Life Characteristics (500 W TYPE)
120
0
500
1000
OPERATING TIME (h)
RELA
TIVE INTENSITY
(%)
1500
2000
100
80
60
40
20
0
L8288 at 365 nm
L8288 at 248 nm
CONVENTIONAL at 365 nm
TLSXB0115EA
TLSX1035E01
AUG. 2001 IP
Printed in Japan (500)
CHARACTERISTICS
IBrightness Comparison (100 W Type: 248 nm)
IBlock diagram of brightness measurement
GBrightness profile the horizontal and vertical brightness profile simultaneously.
GSpectral Distribution (200 nm to 300 nm)
GLamp Power Supplies
GLamp Housing
TLSXC0042EA
L8029
Lamp current: 5.5 A
Lamp voltage: 19.7 V
CONVENTIONAL
TYPE
Lamp current: 5.5 A
Lamp voltage: 18.6 V
LAMP
HOUSING
125 mm
35 mm
370 mm
10 %
ND FILTER
5 %
50 %
UV CAMERA
IMAGE PROCESSOR
DVS-3000
(HAMAMATSU)
POWER SUPPLY
C2903
(HAMAMATSU)
LENS
f=100
APERTURE
5 mm
LAMP
248 nm
INTERFERENCE
FILTER
Information furnished by HAMAMATSU is believed to be reliable. However, no responsibility is assumed for possible inaccuracies or omissions. Specifications are
subject to change without notice. No patent rights are granted to any of the circuits described herein. 2001 Hamamatsu Photonics K.K.
Subject to local technical requirements and regulations, availability of products included in this promotional material may vary. Please consult with our sales office.
HAMAMATSU PHOTONICS K.K., Electron Tube Center
314-5, Shimokanzo, Toyooka-village, Iwata-gun, Shizuoka-ken, 438-0193, Japan, Telephone: (81)539/62-5248, Fax: (81)539/62-2205
U.S.A.: Hamamatsu Corporation: 360 Foothill Road, P. O. Box 6910, Bridgewater. N.J. 08807-0910, U.S.A., Telephone: (1)908-231-0960, Fax: (1)908-231-1218 E-mail: usa@hamamatsu.com
Germany: Hamamatsu Photonics Deutschland GmbH: Arzbergerstr. 10, D-82211 Herrsching am Ammersee, Germany, Telephone: (49)8152-375-0, Fax: (49)8152-2658 E-mail: info@hamamatsu.de
France: Hamamatsu Photonics France S.A.R.L.: 8, Rue du Saule Trapu, Parc du Moulin de Massy, 91882 Massy Cedex, France, Telephone: (33)1 69 53 71 00, Fax: (33)1 69 53 71 10 E-mail: infos@hamamatsu.fr
United Kingdom: Hamamatsu Photonics UK Limited: 2 Howard Court, 10 Tewin Road Welwyn Garden City Hertfordshire AL7 1BW, United Kingdom, Telephone: 44-(0)1707-294888, Fax: 44(0)1707-325777 E-mail: info@hamamatsu.co.uk
North Europe: Hamamatsu Photonics Norden AB: Smidesvgen 12, SE-171-41 SOLNA, Sweden, Telephone: (46)8-509-031-00, Fax: (46)8-509-031-01 E-mail: info@hamamatsu.se
Italy: Hamamatsu Photonics Italia: S.R.L.: Strada della Moia, 1/E, 20020 Arese, (Milano), Italy, Telephone: (39)02-935 81 733, Fax: (39)02-935 81 741 E-mail: info@hamamatsu.it
HOMEPAGE URL http://www.hamamatsu.com
200
0
0.1
0.2
0.3
0.4
0.5
220
240
260
WAVELENGTH (nm)
280
300
RELA
TIVE INTENSITY
L8029
CONVENTIONAL
Hamamatsu provides exclusive power supplies which
have good stability and high light efficiency for lamp
operation.
Please use the power supplies of constant current
regulation method.
Please consult with our sales office about the lamp
housing which can use a lamp more easily.
100 W L8029
250 W L8706
500 W L8288
C6979*, C2577
C7535*, C2577
C2578
Lamp Type No.
Applicable Power Supplies
* C6979 and C7535 are dropper type power supplies. These power
supplies are used in connection with the C4251 trigger unit (sole
separately).
TLSXB0119EA
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