MEMSIC MXD2002A/B Rev 01 Page 1 of 8 04/02
Low Cost,
10 g Dual Axis
Accelerometer with Digital Outputs
MXD2002A/B
FEATURES
Dual axis accelerometer fabricated on a monolithic CMOS IC
On-chip mixed mode signal processing
Resolution better than 6 milli-g
50,000 g shock survival rating
30 Hz bandwidth
2.70V to 5.25V single supply operation
Small (5mm x 5mm x 2mm) surface mount package
Continuous self test
Independently programmable axis (factory special)
APPLICATIONS
Automotive Vehicle Security/Active Suspension/ABS
HED Angle Control/Tilt Sensing
Security Gas Line/Elevator/Fatigue Sensing
Office Equipment Computer Peripherals/PDA's/Mouse
Smart Pens/Cell Phones
Gaming Joystick/RF Interface/Menu Selection/Tilt Sensing
White Goods Spin/Vibration Control
Internal
Oscillator
Sck
(optional)
CLK
Heater
Control
X axis
Y axis
Factory Adjust
Offset & Gain
LPF
LPF
Temperature
Sensor
Voltage
Reference
Vref
Dout X
Vdd
Vda
Gnd
2-AXIS
SENSOR
Dout Y
Tout
Continous
Self Test
A/D
A/D
MXD2002A/B FUNCTIONAL BLOCK DIAGRAM
The MXD2002A/B is a very low cost, dual axis
accelerometer fabricated on a standard, submicron CMOS
process. The MXD2002A/B measures acceleration with a
full-scale range of
10 g. (The MEMSIC accelerometer
product line extends from
1 g to 10 g with custom
versions available above
10 g.) It can measure both
dynamic acceleration (e.g., vibration) and static
acceleration (e.g., gravity). The MXD2002A/B design is
based on heat convection and requires no solid proof mass.
This eliminates stiction and particle problems associated
with competitive devices and provides shock survival up to
50,000 g, leading to significantly lower failure rates and
lower loss due to handling during assembly.
The MXD2002A/B provides a digital output (ref. other
MEMSIC data sheets for analog or ratiometric analog
outputs). The outputs are digital signals with duty cycles
(ratio of pulsewidth to period) that are proportional to
acceleration. The duty cycle outputs can be directly
interfaced to a micro-processor.
Information furnished by MEMSIC is believed to be accurate and reliable.
However, no responsibility is assumed by MEMSIC for its use, nor for any
infringements of patents or other rights of third parties which may result from
its use. No license is granted by implication or otherwise under any patent or
patent rights of MEMSIC.
The typical noise floor is .0015% duty cycle
/ Hz allowing
signals below 6 milli-g to be resolved at 1 Hz bandwidth.
The MXD2002A/B is available in a low profile LCC
surface mount package (5mm x 5mm x 2mm height). It is
hermetically sealed and operational over a -40
C to +105C
temperature range.
Due to the standard CMOS structure of the MXD2002A/B,
additional circuitry can easily be incorporated into custom
versions for high volume applications. Contact the factory
for more information.
MEMSIC, Inc.
100 Burtt Road, Andover, MA 01810
Tel: 978.623.8188
Fax: 978.623.9945
www.memsic.com
MEMSIC MXD2002A/B Rev 01 Page 2 of 8 04/02
MXD2002A/B SPECIFICATIONS
(Measurements @ 25
C, Acceleration = 0 unless otherwise noted, V
DD
, V
DA
=
5.0V unless otherwise specified)
Parameter
Conditions
Min
MXD2002A/B
Typ
Max
Units
SENSOR INPUT
Measurement Range
1
Each Axis
10
g
Nonlinearity
Best fit straight line
1.0
2.0
% of FS
Alignment Error
2
1.0
degrees
Transverse Sensitivity
3
2.0
%
SENSITIVITY
D
OUTX
and D
OUTY
Each Axis
@5.0V supply
1.80
2.00
2.20
% Duty
Cycle/g
Change over Temperature (uncompensated)
4
from 25C, at 40C
+93
%
from 25C, at +105C
-47
%
Change over Temperature (compensated)
4
from 25C, 40C to +105C
<3.0
%
ZERO g BIAS LEVEL
0 g Offset
5
Each Axis
-0.70
0.00
+0.70
g
0 g Duty Cycle
5
48.6
50
51.4
% Duty Cycle
0 g Offset over Temperature
from 25C
from 25C, based on 2%/g
2.0
004
mg/
C
% /
C
NOISE PERFORMANCE
Noise Density, % Duty Cycle
.0015
0.005
% Duty
Cycle/
Hz
FREQUENCY RESPONSE
3dB Bandwidth
30
Hz
TEMPERATURE OUTPUT
T
out
Voltage
1.21
1.25
1.29
V
Sensitivity
4.6
5.0
5.4
mV/
K
VOLTAGE REFERENCE
V
Ref
@2.7V-5.0V
supply
2.4
2.5
2.65
V
Change over Temperature
0.1
mV/
C
Current Drive Capability
Source
100
A
SELF TEST
Continuous Voltage at D
OUTX
, D
OUTY
under
Failure
@5.0V Supply, output rails to
supply voltage
5.0
V
Continuous Voltage at D
OUTX
, D
OUTY
under
Failure
@2.7V Supply, output rails to
supply voltage
2.7
V
D
OUTX
and D
OUTY
OUTPUTS
Digital Signal of 100 Hz or 400Hz
Normal Output Range
@5.0V Supply
@2.7V Supply
0.1
0.1
4.9
2.6
V
V
Current
Source or sink, @ 2.7V-5.0V supply
100
A
Rise/Fall Time
2.7 to 5.0V Supply
90
100
110 nSec
POWER SUPPLY
Operating Voltage Range
2.7
5.25
V
Supply Current
@ 5.0V
3.0
4.2
4.9
mA
Supply Current
6,7
@
2.7V
3.0
5.4
6
mA
TEMPERATURE RANGE
Operating Range
-40
+105
C
NOTES
1
Guaranteed by measurement of initial offset and sensitivity.
2
Alignment error is specified as the angle between the true and indicated
axis of sensitivity.
3
Transverse sensitivity is the algebraic sum of the alignment and the
inherent sensitivity errors
4
The sensitivity change over temperature for thermal accelerometers is
based on variations in heat transfer that are governed by the laws of
physics and it is highly consistent from device to device. Please refer to
the section in this data sheet titled "Compensation for the Change of
Sensitivity over Temperature" for more information.
5
The device operates over a 2.7V to 5.25V supply range. Please note that
sensitivity and zero g bias level will be slightly different at 2.7V operation.
For devices to be operated at 2.7V/3.0V in production, they can be
trimmed at the factory specifically for this lower supply voltage operation,
in which case the sensitivity and zero g bias level specifications on this
page will be met. Please contact the factory for specially trimmed devices
for low supply voltage operation.
6
Note that the accelerometer has a constant heater power control circuit
thereby displaying higher supply current at lower operating voltage.
MEMSIC MXD2002A/B Rev 01 Page 3 of 8 04/02
ABSOLUTE MAXIMUM RATINGS*
Supply Voltage (V
DD
, V
DA
) .....................-0.5 to +7.0V
Storage Temperature ......................-65
C to +150C
Acceleration ............................................50,000 g
*Stresses above those listed under Absolute Maximum Ratings may cause permanent
damage to the device. This is a stress rating only; the functional operation of the
device at these or any other conditions above those indicated in the operational
sections of this specification is not implied. Exposure to absolute maximum rating
conditions for extended periods may affect device reliability.
Package Characteristics
Package
JA
JC
Device Weight
LCC-8
110
C/W 22C/W
< 1 gram
8
4
1
2
3
7
6
5
Top View
ME
MS
I
C
X +g
Y +g
Note: The MEMSIC logo's arrow indicates the +X sensing
direction of the device. The +Y sensing direction is rotated 90
away from the +X direction.
Pin Description: LCC-8 Package
Pin Name Description
1 T
OUT
Temperature (Analog Voltage)
2 D
OUTY
Y-Axis Acceleration Digital Signal
3 Gnd Ground
4 V
DA
Analog Supply Voltage
5 D
OUTX
X-Axis Acceleration Digital Signal
6 V
ref
2.5V Reference
7
Sck
Optional External Clock
8 V
DD
Digital Supply Voltage
Ordering Guide
Model Package
Style
Digital
Output
D2002AL LCC-8 SMD*
100 Hz
D2002BL LCC-8 SMD*
400 Hz
*LCC parts are shipped in tape and reel packaging.
Caution
ESD (electrostatic discharge) sensitive device.
THEORY OF OPERATION
The MEMSIC device is a complete dual-axis acceleration
measurement system fabricated on a monolithic CMOS IC
process. The device operation is based on heat transfer by
natural convection and operates like other accelerometers
having a proof mass. The stationary element, or `proof
mass', in the MEMSIC sensor is a gas.
A single heat source, centered in the silicon chip is
suspended across a cavity. Equally spaced
aluminum/polysilicon thermopiles (groups of
thermocouples) are located equidistantly on all four sides of
the heat source (dual axis). Under zero acceleration, a
temperature gradient is symmetrical about the heat source,
so that the temperature is the same at all four thermopiles,
causing them to output the same voltage.
Acceleration in any direction will disturb the temperature
profile, due to free convection heat transfer, causing it to be
asymmetrical. The temperature, and hence voltage output
of the four thermopiles will then be different. The
differential voltage at the thermopile outputs is directly
proportional to the acceleration. There are two identical
acceleration signal paths on the accelerometer, one to
measure acceleration in the x-axis and one to measure
acceleration in the y-axis. Please visit the MEMSIC
website at www.memsic.com for a picture/graphic
description of the free convection heat transfer principle.
PIN DESCRIPTIONS
V
DD
This is the supply input for the digital circuits and
the sensor heater in the
accelerometer
. The DC voltage
should be between 2.70 and 5.25 volts. Refer to the section
on PCB layout and fabrication suggestions for guidance on
external parts and connections recommended.
V
DA
This is the power supply input for the analog
amplifiers in the
accelerometer
. Refer to the section on PCB
layout and fabrication suggestions for guidance on external
parts and connections recommended.
Gnd This is the ground pin for the
accelerometer
.
D
OUTX
This pin is the digital output of the x-axis
acceleration sensor. It is factory programmable to 100 Hz
or 400 Hz. The user should ensure the load impedance is
sufficiently high as to not source/sink >100
A typical.
While the sensitivity of this axis has been programmed at
the factory to be the same as the sensitivity for the y-axis,
the
accelerometer
can be programmed for non-equal
sensitivities on the x- and y-axes. Contact the factory for
additional information.
D
OUTY
This pin is the digital output of the y-axis
acceleration sensor. It is factory programmable to 100 Hz
MEMSIC MXD2002A/B Rev 01 Page 4 of 8 04/02
or 400 Hz. The user should ensure the load impedance is
sufficiently high as to not source/sink >100
A typical.
While the sensitivity of this axis has been programmed at
the factory to be the same as the sensitivity for the x-axis,
the
accelerometer
can be programmed for non-equal
sensitivities on the x- and y-axes. Contact the factory for
additional information.
T
OUT
This pin is the buffered output of the temperature
sensor. The analog voltage at T
OUT
is an indication of the
die temperature. This voltage is useful as a differential
measurement of temperature from ambient and not as an
absolute measurement of temperature. After correlating the
voltage at T
OUT
to 25
C ambient, the change in this voltage
due to changes in the ambient temperature can be used to
compensate for the change over temperature of the
accelerometer offset and sensitivity. Please refer to the
section on Compensation for the Change in Sensitivity
Over Temperature for more information.
Sck The standard product is delivered with an internal
clock option (800kHz). This pin should be grounded
when operating with the internal clock. An external
clock option can be special ordered from the factory
allowing the user to input a clock signal between 400kHz
And 1.6MHz
V
ref
A reference voltage is available from this pin. It is
set at 2.50V typical and has 100
A of drive capability.
COMPENSATION FOR THE CHANGE IN
SENSITIVITY OVER TEMPERATURE
All thermal accelerometers display the same sensitivity
change with temperature. The sensitivity change depends
on variations in heat transfer that are governed by the laws
of physics. Manufacturing variations do not influence the
sensitivity change, so there are no unit to unit differences in
sensitivity change. The sensitivity change is governed by
the following equation (and shown in Figure 1 in
C):
S
i
x T
i
2.67
= S
f
x T
f
2.67
where S
i
is the sensitivity at any initial temperature T
i
, and
S
f
is the sensitivity at any other final temperature T
f
with
the temperature values in
K and the sensitivity expressed
in % duty cycle/g.
0.0
0.5
1.0
1.5
2.0
-40
-20
0
20
40
60
80
100
Temperature (C)
Sensitivity (normalized)
Figure 1: Thermal Accelerometer Sensitivity
In gaming applications where the game or controller is
typically used in a constant temperature environment,
sensitivity might not need to be compensated in hardware
or software. The compensation for this effect could be
done instinctively by the game player.
For applications where sensitivity changes of a few percent
are acceptable, the above equation can be approximated
with a linear function. Using a linear approximation, an
external circuit that provides a gain adjustment of 0.9%/
C
would keep the sensitivity within 10% of its room
temperature value over a 0
C to +50C range.
For applications that demand high performance, a low cost
micro-controller can be used to implement the above
equation. A reference design using a Microchip MCU (p/n
16F873/04-SO) and MEMSIC developed firmware is
available by contacting the factory. With this reference
design, the sensitivity variation over the full temperature
range (-40
C to +105C) can be kept below 3%. Please
visit the MEMSIC web site at
www.memsic.com
for
reference design information on circuits and programs
including look up tables for easily incorporating sensitivity
compensation.
DISCUSSION OF TILT APPLICATIONS AND
MINIMUM RESOLUTION
Tilt Applications: One of the most popular applications of
the MEMSIC accelerometer product line is in
tilt/inclination measurement. An accelerometer uses the
force of gravity as an input to determine the inclination
angle of an object.
A MEMSIC accelerometer is most sensitive to changes in
position, or tilt, when the accelerometer's sensitive axis is
perpendicular to the force of gravity, or parallel to the
Earth's surface. Similarly, when the accelerometer's axis is
parallel to the force of gravity (perpendicular to the Earth's
surface), it is least sensitive to changes in tilt.
Table 1 and Figure 2 help to illustrate the output changes in
the X- and Y-axes as the unit is tilted from +90
to 0.
Notice that when one axis has a small change in output per
degree of tilt (in mg), the second axis has a large change in
output per degree of tilt. The complementary nature of
these two signals permits low cost accurate tilt sensing to
be achieved with the MEMSIC device (reference
application note AN-00MX-007).
Top View
X
Y
+90
0
0
0
gravity
MEMS
IC
Figure 2: Accelerometer Position Relative to Gravity
MEMSIC MXD2002A/B Rev 01 Page 5 of 8 04/02
X-Axis
Y-Axis
X-Axis
Orientatio
n
To Earth's
Surface
(deg.)
X Output
(g)
Change
per deg.
of tilt
(mg)
Y Output
(g)
Change
per deg.
of tilt
(mg)
90
1.000
0.15 0.000
17.45
85
0.996
1.37 0.087
17.37
80
0.985
2.88 0.174
17.16
70
0.940
5.86 0.342
16.35
60
0.866
8.59 0.500
15.04
45
0.707
12.23 0.707
12.23
30
0.500
15.04 0.866
8.59
20
0.342
16.35 0.940
5.86
10
0.174
17.16 0.985
2.88
5
0.087
17.37 0.996
1.37
0
0.000
17.45 1.000
0.15
Table 1: Changes in Tilt for X- and Y-Axes
Minimum Resolution: Accelerometers can be used in a
wide variety of low g applications such as tilt and
orientation. The device noise floor will vary with the
measurement bandwidth. With the reduction of the
bandwidth the noise floor drops. This will improve the
signal to noise ratio of the measurement and resolution. The
output noise scales directly with the square root of the
measurement bandwidth. The maximum amplitude of the
noise, its peak- to- peak value, approximately defines the
worst case resolution of the measurement. The peak-to-
peak noise is approximately equal to 6.6 times as the rms
value (with an average uncertainty of .1%). The maximum
noise for 1.0Hz bandwidth will be 1 mg
/
Hz . If the
bandwidth is increased to 10 Hz for example: 3.162 mg is
the maximum rms noise and 20.87mg is the maximum
peak -to-peak noise.
DIGITAL INTERFACE
The MXD2002A/B is easily interfaced with low cost
microcontrollers. For the digital output accelerometer, one
digital input port is required to read one accelerometer
output. For the analog output accelerometer, many low cost
microcontrollers are available today that feature integrated
a/d (analog to digital converters) with resolutions ranging
from 8 to 12 bits.
In many applications the microcontroller provides an
effective approach for the temperature compensation of the
sensitivity and the zero g offset. Specific code set, reference
designs, and applications notes are available from the
factory. The following parameters must be considered in a
digital interface:
Resolution: smallest detectable change in input acceleration
Bandwidth: detectable accelerations in a given period of
time
Acquisition Time: the duration of the measurement of the
acceleration signal
DUTY CYCLE DEFINITION
The MXD2002A/B has two PWM duty cycle outputs (x,y).
The acceleration is proportional to the ratio T1/T2. The
zero g output is set to 50% duty cycle and the sensitivity
scale factor is set to 2% duty cycle change per g. These
nominal values are affected by the initial tolerance of the
device including zero g offset error and sensitivity error.
This device is offered from the factory programmed to
either a 10ms period (100 Hz) or a 2.5ms period (400Hz).
T1
Length of the "on" portion of the cycle.
T2 (Period)
Length of the total cycle.
Duty Cycle
Ratio of the "0n" time (T1) of the cycle to
the total cycle (T2). Defined as T1/T2.
Pulse width
Time period of the "on" pulse. Defined as
T1.
T2
T1
A (g)= (T1/T2 - 0.5)/2%
0g = 50% Duty Cycle
T2= 2.5ms or 10ms (factory programmable)
Figure 4: Typical output Duty C ycle
CHOOSING T2 AND COUNTER FREQUENCY
DESIGN TRADE-OFFS
The noise level is one determinant of accelerometer
resolution. The second relates to the measurement
resolution of the counter when decoding the duty cycle
output. The actual resolution of the acceleration signal is
limited by the time resolution of the counting devices used
to decode the duty cycle. The faster the counter clock, the
higher the resolution of the duty cycle and the shorter the
T2 period can be for a given resolution. Table 2 shows
some of the trade-offs. It is important to note that this is the
resolution due to the microprocessors' counter. It is
probable that the accelerometer's noise floor may set the
lower limit on the resolution.
T2 (ms)
MEMSIC
Sample
Rate
Counter-
Clock
Rate
(MHz)
Counts
Per T2
Cycle
Counts
per g
Reso-
lution
(mg)
2.5 400
2.0
5000
100 10
2.5 400
1.0
2500
50 20
2.5 400
0.5
1250
25 40
10.0 100
2.0
20000
400 2.5
10.0 100
1.0
10000
200 5.0
10.0 100
0.5
5000
100 10
Table 2: Trade-Offs Between Microcontroller Counter Rate and
T2 Period.
MEMSIC MXD2002A/B Rev 01 Page 6 of 8 04/02
USING THE ACCELEROMETER IN VERY LOW
POWER APPLICATIONS (BATTERY OPERATION)
In applications with power limitations, power cycling can
be used to extend the battery operating life. One important
consideration when power cycling is that the accelerometer
turn on time limits the frequency bandwidth of the
accelerations to be measured. For example, operating at
2.7V the turn on time is 40mS. To double the operating
time, a particular application may cycle power ON for
40mS, then OFF for 40mS, resulting in a measurement
period of 80mS, or a frequency of 12.5Hz. With a
frequency of measurements of 12.5Hz, accelerations
changes as high as 6.25Hz can be detected.
Power cycling can be used effectively in many inclinometry
applications, where inclination changes can be slow and
infrequent.
COMPENSATION FOR ZERO G OFFSET CHANGE
OVER TEMPERATURE
The compensation of offset is performed with the following
equation: Aoc = A + ( a + b * T + c * T * T)
where Aoc is the offset compensated acceleration, A is the
uncompensated acceleration, T is temperature and a, b, c
are constants characteristic to each accelerometer.
Computer programs are used to determine these constants.
The constants can be read from and written to the MCU
EEPROM via the RS-232. The constants a,b,c are normally
stored in the MCU EEPROM. To determine the values of
the constants, each accelerometer is taken to three different
temperatures, preferably evenly spread across the desired
temperature span. The zero g bias (A0, A1 and A2) and the
temperatures (T0, T1 and T2) are recorded at each
temperature. The data collected (A0, T0, A1, T1, A2, T2) is
used in a quadratic interpolation (or LaGrange polynomial)
to determine a, b and c as follows:
r0 = A0 / ( (T0-T1)*(T0-T2) )
r1 = A1 / ( (T1-T0)*(T1-T2) )
r2 = A2 / ( (T2-T0)*(T2-T1) )
a = r0 * T1 * T2 + r1 * T0 * T2 + r2 * T0 * T1
b = - r0 * (T1+T2) r1 * (T0+T2) r2 *(T0+T1)
c = r0 + r1 + r2
In many cases a computer is used to control the
temperature, communicate with the MCU, and to calculate
the constants. After calculating the constants, the computer
downloads the constants to EEPROM.
For a more detail discussion of temperature compensation
reference MEMSIC application note #AN-00MX-002
Microcontroller
MEMSIC
Accel
I/O
I/O
A/D
Ax
Ay
T
Figure 5: Zero g Offset Temperature Compensation Circuit
COMPENSATION FOR EXTENDING THE
FREQUENCY RESPONSE
The response of the thermal accelerometer is a function of
the internal gas physical properties, the natural convection
mechanism and the sensor electronics. Since the gas
properties of MEMSIC's mass produced accelerometer are
uniform, a digital filter can be used to equally compensate
all sensors. The compensating filter does not require
adjustment for individual accelerometers. The function of
the compensating filter is to apply gain in proportion with
the acceleration changes. The faster the acceleration
changes occur, the higher the gain that the filter applies.
For analog output accelerometers, the compensating filter
can be implemented with a circuit involving two op-amps
and some resistors and capacitors. For digital output
accelerometers, a digital filter is necessary.
In applications where high frequency accelerations need to
be measured, a DSP (digital signal processor) may be
necessary to implement the digital filter. DSP IC's and
development tools are readily available from major IC
manufacturers.
However, if the bandwidth requirement is relatively low
(i.e. 100Hz), it is possible to implement a digital frequency
compensating filter with an 8 bit microcontroller. The
microcontroller will likely have to be capable of operating
at relatively high clock frequencies (20MHz).
CONVERTING THE DIGITAL OUTPUT TO AN
ANALOG OUTPUT
The PWM output can be easily converted into an analog
output by integration. A simple RC filter can do the
conversion. Note that that the impedance of the circuit
following the integrator must be much higher than the
impedance of the RC filter. Reference figure 6 for an
example.
1uF
DOUT
AOUT
10K
MEMSIC
Accel.
Figure 6: Converting the digital output to an analog voltage
MEMSIC MXD2002A/B Rev 01 Page 7 of 8 04/02
TEMPERATURE OUTPUT NOISE REDUCTION
It is recommended that a simple RC low pass filter is used
when measuring the temperature output. Temperature
output is typically a very slow changing signal, so a very
low frequency filter eliminates erroneous readings that may
result from the presence of higher frequency noise. A
simple filter is shown in Figure 8.
Filtered TOUT
8.2K
0.1uF
MEMSIC
Accel.
TOUT
Figure 8: Temperature Output Noise Reduction
POWER SUPPLY NOISE REJECTION
Two capacitors and a resistor are recommended for best
rejection of power supply noise (reference Figure 9 below).
The capacitors should be located as close as possible to the
device supply pins (V
DA
, V
DD
). The capacitor lead length
should be as short as possible, and surface mount capacitors
are preferred. For typical applications, capacitors C1 and
C2 can be ceramic 0.1 F, and the resistor R can be 10 .
In 5V applications where power consumption is not a
concern, maximum supply noise rejection can be obtained
by significantly increasing the values of C1, C2 and R. For
example, C1 = C2 = 0.47 F and R = 270 will virtually
eliminate power supply noise effects.
R
MEMSIC
Accelerometer
VDA
C1
C2
VDD
V SUPPLY
Figure 9: Power Supply Noise Rejection
PCB LAYOUT AND FABRICATION SUGGESTIONS
1. The Sck pin should be grounded to minimize noise.
2. Liberal use of ceramic bypass capacitors is
recommended.
3. Robust low inductance ground wiring should be used.
4. Care should be taken to ensure there is "thermal
symmetry" on the PCB immediately surrounding the
MEMSIC device and that there is no significant heat
source nearby.
5. A metal ground plane should be added directly beneath
the MEMSIC device. The size of the ground plane
should be similar to the MEMSIC device's footprint
and as thick as possible.
6. Vias can be added symmetrically around the ground
plane. Vias increase thermal isolation of the device
from the rest of the PCB
MEMSIC MXD2002A/B Rev 01
Page 8 of 8
04/02
PPACKAGE DRAWING
Fig 10: Soldering Device Outline
PDF 
ZIP