1
Motorola Sensor Device Data
Preliminary Information
Micromachined Accelerometer
250g Amplified
The MMAS250G family of silicon capacitive, micromachined accelerome-
ters features integral signal amplification, signal conditioning, a 4pole
lowpass filter and temperature compensation. ZeroG offset, full scale span
and filter rolloff are factory set and require no external passives. A calibrated
selftest feature mechanically displaces the seismic mass with the application
of a digital selftest signal. The device is offered in either of two plastic
packages, thereby accommodating various axis orientation requirements.
The MMAS250G incorporates a single polysilicon seismic mass, suspended
between two fixed polysilicon plates (Gcell). The forces of acceleration move
the seismic mass, thereby resulting in a change in capacitance. The Gcell is
sealed at the die level, creating a particlefree environment. The Gcell
features builtin damping and overrange stops to protect it from mechanical
shock.
MMAS250G accelerometers are ideally suited for automotive crash detection
and recording, vibration monitoring, automotive suspension control, appliance
control systems, etc.
Features
Full Scale Measurement
250g
Calibrated, True SelfTest
Standard 16Pin Plastic DIP
Integral Signal Conditioning and 4Pole Filter
Linear Output
Robust, High Shock Survivability
SIMPLIFIED BLOCK DIAGRAM
g
4
SELFTEST
+
+
8
VS
+
A
LOWPASS FILTER
6
BYPASS
TEMPERATURE
COMPENSATION
5
OUTPUT
7
GND
GCELL
This document contains information on a product under development. Motorola reserves the right to change or discontinue this product without notice.
Order this document
by XMMAS250G/D
MOTOROLA
SEMICONDUCTOR TECHNICAL DATA
PIN NUMBER
XMMAS250G10D
XMMAS250G10S
MICROMACHINED
ACCELEROMETER
250g AMPLIFIED
1
N/C (1)
9
N/C (1)
2
N/C (1)
10
N/C (1)
3
N/C (1)
11
N/C (1)
4
SelfTest
12
N/C (1)
5
Output
13
N/C (1)
6
Bypass (2)
14
N/C (1)
7
GND
15
N/C (1)
8
VS (2)
16
N/C (1)
NOTES:
1. Internal connections. All N/C must
remain floating, except DIP's pin
11 which must be tied to pin 8.
2. Bypass to ground with 0.1
F ceramic
capacitor to improve noise performance.
DIP PACKAGE
CASE 648C03
SIP PACKAGE
CASE 44701
Motorola, Inc. 1995
XMMAS250G10D XMMAS250G10S
2
Motorola Sensor Device Data
MAXIMUM RATINGS
Rating
Symbol
Value
Unit
Acceleration (biased each axis)
G
500
g
Acceleration (unbiased each axis)
G
2000
g
Supply Voltage
VSmax
0.3 to +7.0
Vdc
Storage Temperature
Tstg
40 to +125
C
Operating Temperature(6)
TA
40 to +85
C
OPERATING CHARACTERISTICS
(VS = 5.0 Vdc, TA = 25
C unless otherwise noted)
Characteristic
Symbol
Min
Typ
Max
Unit
Acceleration Range
G
250
--
--
g
Output Drive Capability
--
0.2
--
0.2
mA
Supply Voltage
VS
4.75
5.0
5.25
V
Supply Current
IO
--
5.0
--
mA
Full Scale Output Range
VFSO
0.3
--
4.7
V
Sensitivity (over temperature range) (1) (2) (3)
V/
G
5.8
6.5
7.2
mV/g
Zero Acceleration Output (TA = 25
C) (4)
Voff
2.3
2.5
2.7
V
Zero Acceleration Output (over temperature range) (3) (4)
Voff
2.1
2.5
2.9
V
Linearity
--
--
0.5
--
%FSO
Transverse Sensitivity
--
--
1.0
3.0
%FSO
Frequency Bandwidth
--
--
700
--
Hz
Noise
--
--
20
50
mVpk
SelfTest Output Equivalent (5)
GS
44
50
56
g
SelfTest Triggering Voltage
VTH
1.6
--
3.4
V
SelfTest Input Current
--
--
10
--
A
NOTES:
1. The output voltage increases from the Zero Acceleration Output for positive acceleration and decreases for negative acceleration. The
typical sensitivity is 6.5 mV/g. For example, with VS = 5.0 V, a + 100g input will result in a 3.15 V output. (Voutput = 2.5 + 0.0065 x 100) and
a 100g input will result in a 1.85 V output.
2. Sensitivity is a ratiometric parameter:
V/
G(Vs) =
V/
G(5 V) x (VS / 5 V).
3. The compensated temperature range is 40 to +85
C.
4. Zero Acceleration Output is a ratiometric parameter: Voff(Vs) = Voff(5 V) x (VS / 5 V).
5. Equivalent output in response to a Logic Level One on the selftest pin.
6. Additional temperature range available. Consult factory.
ORDERING INFORMATION
Device
Temperature Range
Case No.
Package
XMMAS250G10D
40 to +85
C
Case 648C03
Plastic DIP
XMMAS250G10S
40 to +85
C
Case 44701
Plastic SIP
XMMAS250G10D XMMAS250G10S
3
Motorola Sensor Device Data
POSITIVE ACCELERATION SENSING DIRECTION
16
9
1
8
1
8
*
DIP PACKAGE
SIP PACKAGE
* When positioned as shown, gravity will result in a positive 1g output
SIP PACKAGE DRILLING PATTERN
7 x
.040
+ .004
.000
2 x
.096
+ .004
.000
2 x
.058
+ .005
.000
.240
.000
.240
.499
.350
.250
.050
.000
.050
.150
.250
.350
.499
Motorola reserves the right to make changes without further notice to any products herein. Motorola makes no warranty, representation or guarantee regarding
the suitability of its products for any particular purpose, nor does Motorola assume any liability arising out of the application or use of any product or circuit,
and specifically disclaims any and all liability, including without limitation consequential or incidental damages. "Typical" parameters can and do vary in different
applications. All operating parameters, including "Typicals" must be validated for each customer application by customer's technical experts. Motorola does
not convey any license under its patent rights nor the rights of others. Motorola products are not designed, intended, or authorized for use as components in
systems intended for surgical implant into the body, or other applications intended to support or sustain life, or for any other application in which the failure of
the Motorola product could create a situation where personal injury or death may occur. Should Buyer purchase or use Motorola products for any such
unintended or unauthorized application, Buyer shall indemnify and hold Motorola and its officers, employees, subsidiaries, affiliates, and distributors harmless
against all claims, costs, damages, and expenses, and reasonable attorney fees arising out of, directly or indirectly, any claim of personal injury or death
associated with such unintended or unauthorized use, even if such claim alleges that Motorola was negligent regarding the design or manufacture of the part.
Motorola and
are registered trademarks of Motorola, Inc. Motorola, Inc. is an Equal Opportunity/Affirmative Action Employer.
XMMAS250G10D XMMAS250G10S
4
Motorola Sensor Device Data
PACKAGE DIMENSIONS
CASE 648C03
ISSUE C
DIP PACKAGE
DIM
MIN
MAX
MIN
MAX
MILLIMETERS
INCHES
A
0.740
0.840
18.80
21.34
B
0.240
0.260
6.10
6.60
C
0.145
0.185
3.69
4.69
D
0.015
0.021
0.38
0.53
E
0.050 BSC
1.27 BSC
F
0.040
0.70
1.02
1.78
G
0.100 BSC
2.54 BSC
J
0.008
0.015
0.20
0.38
K
0.115
0.135
2.92
3.43
L
0.300 BSC
7.62 BSC
M
0
10
0
10
N
0.015
0.040
0.39
1.01
_
_
_
_
NOTES:
1. DIMENSIONING AND TOLERANCING PER ANSI
Y14.5M, 1982.
2. CONTROLLING DIMENSION: INCH.
3. DIMENSION L TO CENTER OF LEADS WHEN
FORMED PARALLEL.
4. DIMENSION B DOES NOT INCLUDE MOLD FLASH.
5. INTERNAL LEAD CONNECTION BETWEEN 4 AND
5, 12 AND 13.
A
B
16
9
1
8
F
D
G
E
N
K
C
NOTE 5
16 PL
S
A
M
0.13 (0.005)
T
T
SEATING
PLANE
S
B
M
0.13 (0.005)
T
J
16 PL
M
L
DIM
MIN
MAX
MIN
MAX
MILLIMETERS
INCHES
A
1.095
1.110
27.18
28.19
B
0.600
0.640
15.24
16.26
C
0.428
0.434
10.87
11.02
D
0.016
0.020
0.41
0.51
E
0.125
0.135
3.18
3.43
F
0.063
0.068
1.60
1.73
G
0.095
0.105
1.65
2.67
H
0.236
0.244
5.99
6.20
J
0.009
0.011
0.23
0.28
K
0.114
0.124
2.90
3.15
L
0.045
0.055
1.14
1.40
M
0.058
0.065
1.47
1.65
N
0.295
0.305
7.49
7.75
P
0.875
0.885
22.22
22.48
Q
0.051
0.055
1.30
1.40
R
0.000
0.007
0.00
0.18
S
0.480
0.490
12.19
12.45
U
0.040
0.050
1.02
1.27
V
0.075
0.085
1.90
2.16
NOTES:
1. DIMENSIONING AND TOLERANCING PER ANSI
Y14.5M, 1982.
2. CONTROLLING DIMENSION: INCH.
N B
E
V
A
P
R
M
D
S
L
G
U
F
C
K
J
H
Q
CASE 44701
ISSUE A
Literature Distribution Centers:
USA: Motorola Literature Distribution; P.O. Box 20912; Phoenix, Arizona 85036.
EUROPE: Motorola Ltd.; European Literature Centre; 88 Tanners Drive, Blakelands, Milton Keynes, MK14 5BP, England.
JAPAN: Nippon Motorola Ltd.; 4-32-1, Nishi-Gotanda, Shinagawa-ku, Tokyo 141, Japan.
ASIA PACIFIC: Motorola Semiconductors H.K. Ltd.; Silicon Harbour Center, No. 2 Dai King Street, Tai Po Industrial Estate, Tai Po, N.T., Hong Kong.
XMMAS250G/D
*XMMAS250G/D*
CODELINE TO BE PLACED HERE
PDF 
ZIP