TO-8-6
Semiconductor Group
1
02.97
Silicon Piezoresistive
Relative Pressure Sensor
KPY 51-RK
KPY 57-RK
Features
Low pressure and temperature hysteresis
Fast response
High sensitivity and linearity
Fatigue free monocrystaline silicon diaphragm
giving high load cycle stability
High long term stability
Built in silicon temperature sensor
Provided for further fabrication, protection cap
Type and
Marking
Symbol
Pressure Range
Unit
Ordering Code
KPY 51 RK
P
0
...
P
N
0
...
0.25
bar
Q62705-K189
KPY 52 RK
0
...
0.6
Q62705-K190
KPY 53 RK
0
...
1.6
Q62705-K191
KPY 54 RK
0
...
4
Q62705-K193
KPY 55 RK
0
...
10
Q62705-K195
KPY 56 RK
0
...
25
Q62705-K197
KPY 57 RK
0
...
60
Q62705-K199
Pin Configuration
1
Capillary tube
2
+
V
IN
3
-
V
OUT
4
Temperature sensor
(typ.
R
25
= 2 k
)
5
Temperature sensor
6
-
V
IN
7
+
V
OUT
8
Not connected
KPY 51-RK
KPY 57-RK
Semiconductor Group
2
1) Frontside coupling applies pressure onto chip face.
Rearside coupling applies pressure through Kovar centre tube.
Absolute Maximum Ratings
Parameter
Symbol
Limit Values
1)
Unit
Frontside Rearside
Pressure overload
KPY 51 RK
KPY 52 RK
KPY 53 RK
KPY 54 RK
KPY 55 RK
KPY 56 RK
KPY 57 RK
P
MAX
2
6
10
16
30
75
100
2
6
10
16
30
40
70
bar
Operating temperature range
T
A
-
40
... +
125
C
Storage temperature range
T
stg
-
50
... +
150
C
Supply voltage
V
IN
12
V
Electrical Characteristics
at
T
A
= 25 C and
V
IN
= 5 V, unless otherwise specified.
Parameter
Symbol
Limit Values
Unit
min.
typ.
max.
Bridge resistance
R
B
4
-
8
k
Sensitivity
KPY 51 RK
KPY 52 RK
KPY 53 RK
KPY 54 RK
KPY 55 RK
KPY 56 RK
KPY 57 RK
s
16.8
11.0
5.6
4.0
1.8
0.88
0.47
24.0
15.0
8.8
6.0
2.6
1.2
0.67
32.0
24.0
12.5
9.0
4.0
2.0
1.0
mV/
Vbar
Output voltage
KPY 51 RK
KPY 52 RK
KPY 53 RK
KPY 54 RK
KPY 55 RK
KPY 56 RK
KPY 57 RK
V
fin
21
33
45
80
90
110
140
30
45
70
120
130
150
200
40
72
100
180
200
250
300
mV
KPY 51-RK
KPY 57-RK
Semiconductor Group
3
Offset voltage
P
=
P
0
V
0
-
25
-
+
25
mV
Linearity error (Best fit straight line)
P
0
=
P
0
...
P
N
F
L
%
V
fin
KPY 51
...
55 RK
KPY 56/57 RK
-
-
0.15
0.15
0.35
-
Pressure hysteresis
P
1
=
P
0
,
P
2
=
P
N
,
P
3
=
P
0
KPY 51
...
57 RK
P
H
-
0.1
-
%
V
fin
Electrical Characteristics
at
T
1
= 25 C,
T
2
= 125 C,
T
3
= 25 C and
V
IN
= 5 V, unless otherwise specified.
Parameter
Symbol
Limit Values
Unit
min.
typ.
max.
Temperature coefficient of
V
fin
TC
Vfin
%/K
KPY 51 RK
KPY 52 RK
KPY 53 RK
KPY 54 RK
KPY 55 RK
KPY 56 RK
KPY 57 RK
-
0.19
-
0.19
-
0.19
-
0.19
-
0.19
-
0.19
-
0.19
-
0.13
-
0.15
-
0.16
-
0.17
-
0.17
-
0.17
-
0.17
-
0.09
-
0.12
-
0.13
-
0.14
-
0.14
-
0.15
-
0.15
Temperature coefficient of
V
0
TC
V0
%/K
KPY 51 RK
KPY 52 RK
KPY 53 RK
KPY 54 RK
KPY 55 RK
KPY 56 RK
KPY 57 RK
-
0.05
-
0.05
-
0.03
-
0.03
-
0.03
-
0.03
-
0.01
-
-
-
-
-
-
-
+
0.05
+
0.05
+
0.03
+
0.03
+
0.03
+
0.03
+
0.01
Temperature coefficient of
R
B
TC
RB
%/K
KPY 51
...
57 RK
-
+
0.095
-
Electrical Characteristics (cont'd)
at
T
A
= 25 C and
V
IN
= 5 V, unless otherwise specified.
Parameter
Symbol
Limit Values
Unit
min.
typ.
max.
KPY 51-RK
KPY 57-RK
Semiconductor Group
4
Package Outline
Temperature hysteresis of
V
0
;
V
fin
TH
% v.
V
fin
KPY 51 RK
KPY 52 RK
KPY 53
...
57 RK
-
0.7
-
0.5
-
0.3
-
-
-
+
0.7
+
0.5
+
0.3
Electrical Characteristics (cont'd)
at
T
1
= 25 C,
T
2
= 125 C,
T
3
= 25 C and
V
IN
= 5 V, unless otherwise specified.
Parameter
Symbol
Limit Values
Unit
min.
typ.
max.
TO-8-6
Weight approx. 4.5 g
Dimension in mm
Exterior Packaging
I.e. tubes, trays, boxes are shown in our Data Book "Package Information".
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