Similar to TO-39-2
Semiconductor Group
1
1998-05-08
Silicon Piezoresistive
Absolute Pressure Sensor
Preliminary Data
KPY 62-AK
KPY 69-AK
Features
Low pressure and temperature hysteresis
Fast response
High sensitivity and linearity
Fatigue free monocrystaline silicon diaphragm
giving high load cycle stability
High long term stability
Built in silicon temperature sensor
Provided for further fabrication, protection cap
Type and
Marking
Symbol
Pressure Range
Unit
Ordering Code
KPY 62 AK
P
0
...
P
N
0
...
0.6
bar
Q62705-K275
KPY 63 AK
0
...
1.6
Q62705-K276
KPY 64 AK
0
...
4
Q62705-K277
KPY 65 AK
0
...
10
Q62705-K278
KPY 66 AK
0
...
25
Q62705-K279
KPY 67 AK
0
...
60
Q62705-K280
KPY 68 AK
0
...
160
Q62705-K281
KPY 69 AK
0
...
400
Q62705-K282
Pin Configuration
1
Temperature sensor
(typ.
R
25
= 2 k
)
2
Not connected
3
+
V
IN
; Temperature sensor
4
-
V
OUT
5
Capillary tube
6
Shielding, to be connected
to +
V
IN
7
-
V
IN
8
+
V
OUT
KPY 62-AK
KPY 69-AK
Semiconductor Group
2
1998-05-08
Absolute Maximum Ratings
Parameter
Symbol
Limit Values
Unit
Pressure overload
KPY 62 AK
KPY 63 AK
KPY 64 AK
KPY 65 AK
KPY 66 AK
KPY 67 AK
KPY 68 AK
KPY 69 AK
P
MAX
4
8
12
20
50
70
200
500
bar
Operating temperature range
T
A
-
40
... +
125 C
Storage temperature range
T
stg
-
50
... +
125 C
Supply voltage
V
IN
12
V
Electrical Characteristics
at
T
A
= 25 C and
V
IN
= 5 V, unless otherwise specified.
Parameter
Symbol
Limit Values
Unit
min.
typ.
max.
Bridge resistance
R
B
4
-
8
k
Sensitivity
KPY 62 AK
KPY 63 AK
KPY 64 AK
KPY 65 AK
KPY 66 AK
KPY 67 AK
KPY 68 AK
KPY 69 AK
s
23.3
11.3
6.5
3.6
1.1
0.63
0.38
0.16
43.0
20.0
11.0
5.2
2.1
1.0
0.53
0.22
73.3
30.0
15.5
8.0
3.0
1.4
0.66
0.27
mV/
Vbar
Output voltage
KPY 62 AK
KPY 63 AK
KPY 64 AK
KPY 65 AK
KPY 66 AK
KPY 67 AK
KPY 68 AK
KPY 69 AK
V
fin
70
90
130
180
150
190
310
330
130
160
220
260
260
300
420
440
220
240
310
400
370
410
530
550
mV
KPY 62-AK
KPY 69-AK
Semiconductor Group
3
1998-05-08
Offset voltage
P
=
P
0
V
0
-
25
-
+
25
mV
Linearity error (Best fit straight line)
P
0
=
P
0
...
P
N
F
L
%
V
fin
KPY 62
...
65 AK
KPY 66
...
69 AK
-
-
0.3
0.3
0.5
-
Pressure hysteresis
P
1
=
P
0
,
P
2
=
P
N
,
P
3
=
P
0
KPY 62
...
69 AK
P
H
-
0.1
-
%
V
fin
Electrical Characteristics
at
T
1
= 25 C,
T
2
= 125 C,
T
3
= 25 C and
V
IN
= 5 V, unless otherwise specified.
Parameter
Symbol
Limit Values
Unit
min.
typ.
max.
Temperature coefficient of
V
fin
TC
Vfin
%/K
KPY 62
...
69 AK
-
0.22
-
0.18
-
0.15
Temperature coefficient of
V
0
TC
V0
%/K
KPY 62 AK
KPY 63 AK
KPY 64 AK
KPY 65 AK
KPY 66 AK
KPY 67 AK
KPY 68 AK
KPY 69 AK
-
0.04
-
0.04
-
0.02
-
0.02
-
0.02
-
0.01
-
0.01
-
0.01
-
-
-
-
-
-
-
-
+
0.04
+
0.04
+
0.02
+
0.02
+
0.02
+
0.01
+
0.01
+
0.01
Temperature coefficient of
R
B
TC
RB
%/K
KPY 62
...
69 AK
-
+
0.23
-
Temperature hysteresis of
V
0
;
V
fin
TH
% v.
V
fin
KPY 62
...
66 AK
KPY 67
...
69 AK
-
-
0.2
-
0.1
-
-
Electrical Characteristics (cont'd)
at
T
A
= 25 C and
V
IN
= 5 V, unless otherwise specified.
Parameter
Symbol
Limit Values
Unit
min.
typ.
max.
KPY 62-AK
KPY 69-AK
Semiconductor Group
4
1998-05-08
Package Outline
Similar to TO-39-2
Weight approx. 1.5 g
GMT05959
5
18.2
0.6
8
0.65
-0.1
1.05
0.1
11.5
5.08
-0.5
0.6
14.2
0.6
0.6
0.6
6.2
3.59
45
0.5
8
0.1
12
2.6 max
0.1
7.6
9.3
-0.2
Basic Component
Component Delivery Form
View on Chip
Bond Wire
Loop
1
5
6
8
4
2
3
7
3.59
5.08
Dimensions in mm
Exterior Packaging
I.e. tubes, trays, boxes are shown in our Data Book "Package Information".
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