Similar to TO-39-3
Semiconductor Group
1
1998-05-11
Silicon Piezoresistive
Pressure Sensor
KPY 62-RK
KPY 66-RK
Features
Low pressure and temperature hysteresis
Fast response
High sensitivity and linearity
Fatigue free monocrystaline silicon diaphragm
giving high load cycle stability
High long term stability
Built in silicon temperature sensor
Metal housing
Type and
Marking
Symbol
Pressure Range
Unit
Ordering Code
KPY 62 RK
P
0
...
P
N
0
...
600
mbar
Q62705-K319
KPY 63 RK
0
...
1.6
bar
Q62705-K320
KPY 64 RK
0
...
4
Q62705-K321
KPY 65 RK
0
...
10
Q62705-K322
KPY 66 RK
0
...
25
Q62705-K292
Pin Configuration
1
Temp.- Sensor
(typ.
R
25
= 2 k
)
2
Not connected
3
+
V
IN
; Temperature sensor
4
-
V
OUT
5
No pin
6
Shielding, to be connected
to +
V
IN
7
-
V
IN
8
+
V
OUT
KPY 62-RK
KPY 66-RK
Semiconductor Group
2
1998-05-11
1) Frontside coupling applies pressure onto chip face.
Rearside coupling applies pressure through Kovar centre tube.
Absolute Maximum Ratings
Parameter
Symbol
Limit Values
1)
Unit
Frontside Rearside
Pressure overload
KPY 65 RK
KPY 66 RK
P
MAX
20
50
10
10
bar
Operating temperature range
T
A
-
40
... +
125
C
Storage temperature range
T
stg
-
40
... +
125
C
Supply voltage
V
IN
12
V
Electrical Characteristics
at
T
A
= 25 C and
V
IN
= 5 V, unless otherwise specified.
Parameter
Symbol
Limit Values
Unit
min.
typ.
max.
Bridge resistance
R
B
4
-
8
k
Sensitivity
KPY 65 RK
KPY 66 RK
s
3.6
1.1
5.2
2.1
8.0
3.0
mV/
Vbar
Output voltage
KPY 65 RK
KPY 66 RK
V
fin
180
150
260
260
400
370
mV
Offset voltage
P
=
P
0
V
0
-
25
-
+
25
mV
Linearity error (Best fit straight line)
P
0
=
P
0
...
P
N
F
L
%
V
fin
KPY 65
...
66 RK
-
0.3
0.5
Pressure hysteresis
P
1
=
P
0
,
P
2
=
P
N
,
P
3
=
P
0
KPY 65
...
66 RK
P
H
-
0.1
-
%
V
fin
KPY 62-RK
KPY 66-RK
Semiconductor Group
3
1998-05-11
Package Outline
Electrical Characteristics
at
T
1
= 25 C,
T
2
= 125 C,
T
3
= 25 C and
V
IN
= 5 V, unless otherwise specified.
Parameter
Symbol
Limit Values
Unit
min.
typ.
max.
Temperature coefficient of
V
fin
TC
Vfin
%/K
KPY 65
...
66 RK
-
0.22
-
0.18
-
0.15
Temperature coefficient of
V
0
TC
V0
%/K
KPY 65
...
66 RK
-
0.02
-
+
0.02
Temperature coefficient of
R
B
TC
RB
%/K
KPY 65
...
66 RK
-
+
0.23
-
Temperature hysteresis of
V
0
;
V
fin
TH
% v.
V
fin
KPY 65
...
66 RK
-
0.2
-
GMT05804
5
18.2
0.6
8
0.65
-0.1
1.05
0.1
11.5
5.08
-0.5
0.6
14.2
0.6
0.6
0.6
6.2
0.6
22.2
0.1
1.55
3.59
45
16
0.1
0.5
8
0.1
12
2.6 max
0.1
7.6
9.3
-0.2
Basic Component
Component Delivery Form
View on Chip
Bond Wire
Loop
1
5
6
8
4
2
3
7
3.59
5.08
Similar to TO-39-3
Weight approx. 2.0 g
Dimensions in mm
Exterior Packaging
I.e. tubes, trays, boxes are shown in our Data Book "Package Information".
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