Stainless Steel Package
Semiconductor Group
1
02.97
Silicon Piezoresistive
Relative Pressure Sensor
KPY 51-R
KPY 56-R
Features
Low pressure and temperature hysteresis
Fast response
High sensitivity and linearity
Fatigue free monocrystaline silicon diaphragm
giving high load cycle stability
High long term stability
Built in silicon temperature sensor
Media compatible stainless housing
Type and
Marking
Symbol
Pressure Range
Unit
Ordering Code
KPY 51 R
P
0
...
P
N
0
...
0.25
bar
Q62705-K174
KPY 52 R
0
...
0.6
Q62705-K171
KPY 53 R
0
...
1.6
Q62705-K176
KPY 54 R
0
...
4
Q62705-K178
KPY 55 R
0
...
10
Q62705-K180
KPY 56 R
0
...
25
Q62705-K182
Pin Configuration
1
Capillary tube
2
+
V
IN
3
-
V
OUT
4
Temperature sensor
(typ.
R
25
= 2 k
)
5
Temperature sensor
6
-
V
IN
7
+
V
OUT
8
Not connected
KPY 51-R
KPY 56-R
Semiconductor Group
2
1) Frontside coupling applies pressure onto chip face.
Rearside coupling applies pressure through Kovar centre tube.
Absolute Maximum Ratings
Parameter
Symbol
Limit Values
1)
Unit
Frontside
Rearside
Pressure overload
KPY 51 R
KPY 52 R
KPY 53 R
KPY 54 R
KPY 55 R
KPY 56 R
P
MAX
2
6
10
16
30
75
2
6
10
16
30
40
bar
Operating temperature range
T
A
-
40
... +
125
C
Storage temperature range
T
stg
-
50
... +
130
C
Supply voltage
V
IN
12
V
Electrical Characteristics
at
T
A
= 25 C and
V
IN
= 5 V, unless otherwise specified.
Parameter
Symbol
Limit Values
Unit
min.
typ.
max.
Bridge resistance
R
B
4
-
8
k
Sensitivity
KPY 51 R
KPY 52 R
KPY 53 R
KPY 54 R
KPY 55 R
KPY 56 R
s
16.8
11.0
5.6
4.0
1.8
0.88
24.0
15.0
8.8
6.0
2.6
1.2
32.0
24.0
12.5
9.0
4.0
2.0
mV/
Vbar
Output voltage
KPY 51 R
KPY 52 R
KPY 53 R
KPY 54 R
KPY 55 R
KPY 56 R
V
fin
21
33
45
80
90
110
30
45
70
120
130
150
40
72
100
180
200
250
mV
Offset voltage
P
=
P
0
V
0
-
25
-
+
25
mV
KPY 51-R
KPY 56-R
Semiconductor Group
3
Linearity error (Best fit straight line)
P
0
=
P
0
...
P
N
F
L
%
V
fin
KPY 51
...
55 R
KPY 56 R
-
-
0.15
0.15
0.35
-
Pressure hysteresis
P
1
=
P
0
,
P
2
=
P
N
,
P
3
=
P
0
KPY 51
...
56 R
P
H
-
0.1
-
%
V
fin
Electrical Characteristics
at
T
1
= 25 C,
T
2
= 80 C,
T
3
= 25 C and
V
IN
= 5 V, unless otherwise specified.
Parameter
Symbol
Limit Values
Unit
min.
typ.
max.
Temperature coefficient of
V
fin
TC
Vfin
%/K
KPY 51 R
KPY 52 R
KPY 53 R
KPY 54 R
KPY 55 R
KPY 56 R
-
0.20
-
0.20
-
0.20
-
0.20
-
0.20
-
0.20
-
-
-
-
-
-
-
0.09
-
0.12
-
0.13
-
0.14
-
0.15
-
0.15
Temperature coefficient of
V
0
TC
V0
%/K
KPY 51 R
KPY 52 R
KPY 53 R
KPY 54 R
KPY 55 R
KPY 56 R
-
0.03
-
0.03
-
0.03
-
0.03
-
0.03
-
0.03
-
-
-
-
-
-
+
0.08
+
0.08
+
0.05
+
0.05
+
0.05
+
0.05
Temperature coefficient of
R
B
TC
RB
%/K
KPY 51
...
56 R
-
+
0.095
-
Temperature hysteresis of
V
0
;
V
fin
TH
% v.
V
fin
KPY 51
...
56 R
-
0.2
-
Electrical Characteristics (cont'd)
at
T
A
= 25 C and
V
IN
= 5 V, unless otherwise specified.
Parameter
Symbol
Limit Values
Unit
min.
typ.
max.
KPY 51-R
KPY 56-R
Semiconductor Group
4
Package Outline
Stainless Steel Package
Weight 15.5 g
Dimension in mm
Exterior Packaging
I.e. tubes, trays, boxes are shown in our Data Book "Package Information".
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